It was found that the positions of the diffraction spots in the EDPs could be reproduced by simulating a hexagonal structure with c/ a = 12(2/3) 1/2, but the intensities in many EDPs remained unexplained. The different hypotheses reported in the literature have been investigated. Despite the differences in the geometries and elaboration processes, the EDPs of the materials show great similarities. In order to resolve this issue, the microstructures of Si nanowires and Si thin films have been characterized by TEM, high-resolution transmission electron microscopy (HRTEM) and high-resolution scanning transmission electron microscopy. Many explanations have been given in the past, without consensus among the scientific community: size artifacts, twinning artifacts or, more widely accepted, the existence of new hexagonal Si phases. Odd electron diffraction patterns (EDPs) have been obtained by transmission electron microscopy (TEM) on silicon nanowires grown via the vapour–liquid–solid method and on silicon thin films deposited by electron beam evaporation.
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